| Semifield International | GENUS Parts | ||
| Item | OEM | OEM# | Description |
| 1 | Genus | 21718-00 Rev A | Standoff, Plate, Heater, Ceramic |
| 2 | Genus | 21719-00 | Support, Ring, Heater, Ceramic |
| 3 | Genus | 23658-00 Rev A | Thru, Feed, Ceramic |
| 4 | Genus | 23683-00 Rev A | Spacer, Ceramic |
| 5 | Genus | 23688-00 | Cap, Plate, Heater, Ceramic |
| 6 | Genus | 23689-00 | Cap, Ring, Heater, Ceramic |
| 7 | Genus | 25735-03 | Finger, Lift, Ceramic |
| 8 | Genus | 25982-00 Rev 2 | Thru, Feed, Ceramic |