| Semifield International | Matrix Parts | ||
| Item | OEM | OEM# | Description |
| 1 | Matrix | 95-16564 | 150 VALVE ASSEMBLY |
| 2 | Matrix | 992-40281 | ELECTRODE, SLOTTED UPPER |
| 3 | Matrix | 992-40306 | SLOTTED ELECT. W/FLAME UPPER |
| 4 | Matrix | 992-40410 | ELECTRODE SLOTTED LASER POINT |
| 5 | Matrix | 992-60073 | CERAMIC SPACER |
| 6 | Matrix | 992-60101 | QUARTZ CHAMBER |
| 7 | Matrix | 992-60110 | QUARTZ CHAMBER |
| 8 | Matrix | 992-60137 | WAFER LIFT PIN |
| 9 | Matrix | 992-60147 | QUARTZ CHAMBER |
| 10 | Matrix | 992-60148 | PLATE, QUARTZ BAFFLE |
| 11 | Matrix | 992-60207 | QUARTZ CHAMBER 8" |
| 12 | Matrix | 992-60239 | RING, QUARTZ IBM |
| 13 | Matrix | 992-60253 | PLATE, QUARTZ BAFFLE 10.5" |
| 14 | Matrix | 992-60294 | REACTOR, QUARTZ MICROWAVE |
| 15 | Matrix | 992-60309 | QUARTZ BAFFLE |
| 16 | Matrix | 992-60310 | QUARTZ BAFFLE |
| 17 | Matrix | 992-60335 | TUBE, SHORT GAS INLET, MICROWAVE |
| 18 | Matrix | 992-60417 | QUARTZ BAFFLE (60 HOLE) |
| 19 | Matrix | 992-60419 | QUARTZ BAFFLE |
| 20 | Matrix | 992-60425 | RING, CHUCK CERAMIC |
| 21 | Matrix | 992-60426 | RING, VACUUM, BAFFLE CERAMIC |
| 22 | Matrix | 992-60427 | INSULATOR, CHUCK CERAMIC |
| 23 | Matrix | 992-60439 | PLATE, QUARTZ BAFFLE |
| 24 | Matrix | 992-60444 | REACTOR, QTZ, MICROWAVE |
| 25 | Matrix | 992-70051 | ELECTRODE, POSITIVE |
| 26 | Matrix | 992-70275 | CHAMBER GRID |
| 27 | Matrix | 992-70276 | GRID, UPPER |
| 28 | Matrix | 992-70348 | ELECTRODE |
| 29 | Matrix | 994-60050 | SEAL CHUCK |