Semifield International |
Matrix Parts |
Item |
OEM |
OEM# |
Description |
1 |
Matrix |
95-16564 |
150 VALVE
ASSEMBLY |
2 |
Matrix |
992-40281 |
ELECTRODE,
SLOTTED UPPER |
3 |
Matrix |
992-40306 |
SLOTTED ELECT.
W/FLAME UPPER |
4 |
Matrix |
992-40410 |
ELECTRODE
SLOTTED LASER POINT |
5 |
Matrix |
992-60073 |
CERAMIC SPACER |
6 |
Matrix |
992-60101 |
QUARTZ CHAMBER |
7 |
Matrix |
992-60110 |
QUARTZ CHAMBER |
8 |
Matrix |
992-60137 |
WAFER LIFT PIN |
9 |
Matrix |
992-60147 |
QUARTZ CHAMBER |
10 |
Matrix |
992-60148 |
PLATE, QUARTZ
BAFFLE |
11 |
Matrix |
992-60207 |
QUARTZ CHAMBER
8" |
12 |
Matrix |
992-60239 |
RING, QUARTZ IBM |
13 |
Matrix |
992-60253 |
PLATE, QUARTZ
BAFFLE 10.5" |
14 |
Matrix |
992-60294 |
REACTOR, QUARTZ
MICROWAVE |
15 |
Matrix |
992-60309 |
QUARTZ BAFFLE |
16 |
Matrix |
992-60310 |
QUARTZ BAFFLE |
17 |
Matrix |
992-60335 |
TUBE, SHORT GAS
INLET, MICROWAVE |
18 |
Matrix |
992-60417 |
QUARTZ BAFFLE
(60 HOLE) |
19 |
Matrix |
992-60419 |
QUARTZ BAFFLE |
20 |
Matrix |
992-60425 |
RING, CHUCK
CERAMIC |
21 |
Matrix |
992-60426 |
RING, VACUUM,
BAFFLE CERAMIC |
22 |
Matrix |
992-60427 |
INSULATOR, CHUCK
CERAMIC |
23 |
Matrix |
992-60439 |
PLATE, QUARTZ
BAFFLE |
24 |
Matrix |
992-60444 |
REACTOR, QTZ,
MICROWAVE |
25 |
Matrix |
992-70051 |
ELECTRODE,
POSITIVE |
26 |
Matrix |
992-70275 |
CHAMBER GRID |
27 |
Matrix |
992-70276 |
GRID, UPPER |
28 |
Matrix |
992-70348 |
ELECTRODE |
29 |
Matrix |
994-60050 |
SEAL CHUCK |
|
|
|
|