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Semifield International LAM Parts
Item OEM OEM# Description
1 LAM 026182 Electrode, Upper, AL
2 LAM  2101363 WAFER CLAMP
3 LAM 2201679 Screw, Spring, Stainless Steel
4 LAM 2301700 Tube, Ceramic
5 LAM 2301856 Ring, Ceramic, ASIQ
6 LAM 2201679 SCREW, SPRING, STAINLESS STEEL
7 LAM 228-022-0241 CARTRIDGE, DEIONIZER, 10"
8 LAM 2301700 TUBE, CERAMIC
9 LAM 2301856 RING, CERAMIC, ASIQ
10 LAM 4C447 FRAME BLOWER  MODEL: 4C447
11 LAM 5009100000 CLAMP, PLUNGER & RETAINER, CERAMIC (4420)
12 LAM 5009101000 SCREW, VENT, AL.
13 LAM 5009101001 SCREW, VENT, CERAMIC
14 LAM 5009106020 CLAMP, RETAINER, CERAMIC (RAINBOW 4420)
15 LAM 5009106034 ASSY, SPRING, PLUNGER, LAM
16 LAM 5009106067 CHAMBER, PLASMA, QUARTZ
17 LAM 5009106073 DISK, ALIGNMENT
18 LAM 5009106075 RING, COVER, QUARTZ
19 LAM 5009106084 SCREW, #6-32 X 5/8, SS
20 LAM 5009106106 KEY, 3/32 X 8.0 LG.
21 LAM 5009106127 PLUG, PIN, WAFER
22 LAM 5009106133 RING, CLAMP, AL, ASIQ
23 LAM 5009106134 WASHER, SS, 1/4", ASIQ
24 LAM 5009106135 SCREW, SPRING, STAINLESS, ASIQ
25 LAM 5009106137 SLEEVE, TEFLON, ASIQ
26 LAM 5009106138 E-CLIP, SS, ASIQ
27 LAM 5009106139 SCREW, SHOULDER, ASIQ
28 LAM 5009126001 INSULATOR, RING, LAM 490
29 LAM 5009176016 CAP, KEL-F, O.D. -0.370, I.D. -.280
30 LAM 5009176022 INSERT, PLUNGER
31 LAM 5009176028 DOOR, LOAD LOCK (ORIGINAL)
32 LAM 5009176034 CAP, THREADED, FEMALE, KEL-F
33 LAM 5009176035 PLUNGER, HOUSING, KEL-F
34 LAM 5009176036 SCREW, 10-32, KEL-F
35 LAM 5009176043 SCREW, KEL-F, FHSL, 6-32 X 5/8
36 LAM 5009176048 CAP, THREADED, FEMALE, KEL-F, #3/8-16
37 LAM 5009176056 GASKET, TEFLON
38 LAM 5009200001 COVER, SCREW, ELECTRODE, LOWER
39 LAM 515-093894-001 O-RING
40 LAM 600-000134-001 ASSY., CLAMP, RETAINER, &, PLUNGER 
41 LAM 6005000003 KIT, PLUNGER ASSEMBLY, KEL-F
42 LAM 6005000009 KIT, PLUNGER, CERAMIC
43 LAM 6005000010 PUCKS, ALIGNMENT
44 LAM 6005000011 ASSY, PUCK, ALIGNMENT, 11"
45 LAM 6005000016 KIT, PM, PLUNGER, 9600
46 LAM 6005000019 KIT, CLEAN, CHAMBER, 9600
47 LAM 6005000031 KIT, PLUNGER, LONG, KEL-F
48 LAM 6005000046 ASSY, LIFT PIN, CARTRIDGE
49 LAM 6005000047 KIT, PM, RAINBOW, MODEL 4528
50 LAM 602120 ASSEMBLY, PIN, LIFT, WAFER
51 LAM 602258 SCREW, SHOULDER
52 LAM  601124 BAFFLE
53 LAM  601179 BAFFLE PLATE
54 LAM  601187 PLATE-DIFF, ANOD (100, 125, 150MM)
55 LAM  601224 DIFFUSER PLATE
56 LAM  602250 BAFFLE PLATE TOP
57 LAM 6150000015 KIT, SUB-ASSY., PM, ELECTRODE & LIFTER, LOWER
58 LAM 6150000018 KIT, SUB-ASSY., PM, HOUSING, CHAMBER, LOWER
59 LAM 6150000020 KIT, SUB-ASSY., PM, SPINNER, LIFTER
60 LAM 645-000217-001 MICRO SWITCH#311SM706-T
61 LAM 660-024637-026 RFDS
62 LAM 676-000504-003 MOTOR 12 VDC
63 LAM 713-000032-001 BUSHING, VESPEL, LARGE
64 LAM 713-000032-002 BUSHING, VESPEL, SMALL
65 LAM 713-002870-001 SLIT, WINDOW, END POINT, TEFLON
66 LAM 713-004108-001 ANODE PLUG
67 LAM 713-008060-001 GAS FEED STANDOFF
68 LAM 713-011545-002 GUIDE, SPRING
69 LAM 713-011546-002 SLEEVE, PLUNGER GUIDE
70 LAM 713-011548-001 SLEEVE, PLUNGER GUIDE
71 LAM 713-011558-001 RING, ELECTRODE INSULATOR
72 LAM 713-011560-001 RING, SHROUD
73 LAM 713-011574-001 PLUNGER, WAFER CLAMP
74 LAM 713-011575-001 NUT, RETAINER
75 LAM 713-011576-001 ALIGNMENT PIN, CLAMP
76 LAM 713-011577-001 WASHER, CLAMP RETAINING
77 LAM 713-011578-001 SLEEVE, PLUNGER GUIDE
78 LAM 713-011578-003 SLEEVE, PLUNGER GUIDE
79 LAM 713-011579-001 GUIDE, PLUNGER
80 LAM 713-011584-001 PLUNGER, WAFER CLAMP
81 LAM 713-011585-001 COVER, CLAMP BOLT
82 LAM 713-011585-004 INSERT, TEFLON
83 LAM 713-011592-001 WASHER, KEL-F, O.D., -0.625, I.D. -0.200
84 LAM 713-011592-002 WASHER, KEL-F, O.D., -0.625, I.D. -0.240
85 LAM 713-011650-006 RING, FOCUS COMBO
86 LAM 713-011752-001 INSERT, 6-32 THREAD
87 LAM 713-011760-001 WASHER, EDGE, FOCUS, RING
88 LAM 713-011803-002 RING, ELECTRODE CLAMP
89 LAM 713-011926-001 CAP, BOLT ELEC.
90 LAM 713-011928-001 CAP BOLT ELECTRODE
91 LAM 713-011980-001 HOUSING, PLUNGER
92 LAM 713-018426-369 INSERT, VESPEL 6"
93 LAM 713-020801-001 SHLD, WATER, HEADLOAD AXIS
94 LAM 713-020911-102 PLUNGER, WAFER CLAMP, UPPER
95 LAM 713-021267-001 CLAMP, PIN HEAD
96 LAM 713-021268-001 CLAMP, PIN BASE
97 LAM 713-021310-001 WINDOW P.S. MODULE
98 LAM 713-022442-001 LID, ENCLOSURE
99 LAM 713-022446-001 SHIELD SPLASH INNER
100 LAM 713-022447-001 SHIELD SPLASH OUTER
101 LAM 713-023568-001 LIP ENCLOSURE LID
102 LAM 713-023665-001 LID DRIP PAN
103 LAM 713-028281-001 CONFINEMENT RING
104 LAM 713-028485-001 BOLT, ELECTRODE RING CLAMP, KEL-F
105 LAM 713-028487-001 RING, CONFINEMENT, VESPEL
106 LAM 713-028553-001 CONFINEMENT RING
107 LAM 713-028553-002 CONFINEMENT RING
108 LAM 713-028553-103 RING, CONFINEMENT, VESPEL
109 LAM 713-098661-001 SLOTTED PAN
110 LAM 713-140214-001 GUIDE PIN, REV A
111 LAM  713-140214-001-A GUIDE PIN, REV A
112 LAM 713-140397-004 PIN, LOWER ELECTRODE, 6" 10-32 UNF
113 LAM 713-140397-005 PIN, LOWER ELECTRODE
114 LAM 713-140434-001 PIN, INDEX, RING, QTZ.
115 LAM 713-250585-001 HSG, ISOLATOR, RF
116 LAM 713-330153-003 Rod, Adjustable, Clamping, Vespel, 9600
117 LAM 713-330166-002 COVER, ROD, CLAMPING, B.A.C 9600
118 LAM 713-330311-001 CLIP, B.A.C, 9600
119 LAM 713-540183-002 BUSHING, LOWER, PEEK
120 LAM 713-540184-002 BUSHING, UPPER, PEEK
121 LAM 714-330982-001 2 MIL HARD ANODIZE WITH SEALANT
122 LAM 714-460562-002 COVER ELECTRODE HOUSEING, ESC
123 LAM 714-704612-001 LINER, CROSSBAR
124 LAM 715-000743-001 MOUNT GEAR CAP
125 LAM 715-001147-002 KEY, 1/8" SQ. X 0.75" LG.
126 LAM 715-001147-006 KEY, 1/8" SQ. X 3.00" LG.
127 LAM 715-001408-001 ELECTRODE, UPPER
128 LAM 715-001408-003 ELECTRODE, UPPER
129 LAM 715-002007-001 REACTOR HINGE PIN 715-02007-1
130 LAM 715-002206-001 RING, CLAMP ELECTRODE
131 LAM 715-004042-001 ELECTRODE 8"
132 LAM 715-004042-002 ELECTRODE, LOWER
133 LAM 715-004042-003 ELECTRODE, LOWER
134 LAM 715-004042-004 ELECTRODE, LOWER
135 LAM 715-005153-001 SEAL PLATE, REAR
136 LAM 715-005213-001 FOUR PIN LIFTER REPAIR
137 LAM 715-005844-001 RING, ORIFICE
138 LAM 715-005965-001 SEAL PLATE, FRONT
139 LAM 715-006213-001 FOUR PIN LIFTER FLANGE
140 LAM 715-006362-006 SCREW #8 ANODIZED
141 LAM 715-006389-001 SPACER CHAMBER
142 LAM 715-006436-001 BARRIER ION ANODIZED
143 LAM  715-006681-001 BAFFLE, LOWER
144 LAM 715-006719-001 PLATE, SEAL
145 LAM 715-007025-001 ELECTRODE, UPPER
146 LAM 715-007172-001 THREADED FLANGE CLAMP
147 LAM 715-007172-002 FLANGE CLAMP
148 LAM 715-007413-001 FOUR PIN LIFTER
149 LAM 715-007434-001 INSERT GAP HOUSING
150 LAM 715-007435-001 QUAD SEAL RING
151 LAM 715-007469-001 ELECRODE, LOWER  (4-PIN)
152 LAM 715-007469-002 ANODE 3 MILS HARD ANODIZED
153 LAM 715-007469-101 ELECTRODE, LOWER  (4-PIN)
154 LAM 715-007469-102 LOWER ELECTRODE
155 LAM 715-007999-002 ELECTRODE, LOWER  (4-PIN)
156 LAM 715-008079-001 ELECTRODE AL. 5 MIL ANODIZE
157 LAM 715-008331-001 FILTER
158 LAM 715-008369-001 LIFTER, WAFER 4-PIN (0.082)
159 LAM 715-008721-001 ELECTRODE, ALUM.
160 LAM 715-008721-001-R ELECTRODE, ALUM, RADIUS EDGE
161 LAM 715-008763-001 BAFFLE, UPPER
162 LAM 715-009161-001 LIFTER, 4 PIN
163 LAM 715-009306-004 RING, FOCUS OUTER, ALUM.
164 LAM 715-009306-005 FOCUS RING 5"
165 LAM 715-009306-006 RING, FOCUS ANODIZED 
166 LAM 715-009306-006 Ring, Focus, Aluminum, 6", 490
167 LAM 715-009306-006 Ring, Focus, Ceramic, 6", 490
168 LAM 715-009345-001 LOWER SEAL PLATE
169 LAM 715-009360-006 FOCUS RING 715-00936-006
170 LAM 715-009394-001 ELECTRODE, UPPER
171 LAM 715-009583-001 ENTRANCE AND EXIT LIFTER
172 LAM 715-009657-001 RING, EDGE, ANODIZED
173 LAM 715-009777-001 CAP, ELECTRODE
174 LAM 715-009777-002 CAP, ELECTRODE
175 LAM 715-009778-001 CAP, ELECTRODE
176 LAM 715-009778-002 CAP, ELECTRODE
177 LAM 715-009779-001 ELECTRODE, LOWER  (4-PIN)
178 LAM 715-009779-002 ELECTRODE, LOWER  (4-PIN)
179 LAM 715-009827-001 RING, FOCUS INNER, ALUM.
180 LAM 715-009828-001 RING, EDGE 5"
181 LAM 715-011116-002 SLEEVE, NUT, ADJUST
182 LAM 715-011148-002 ASSY, ARM, TENSIONER, CHAIN
183 LAM 715-011148-002 Arm, Tensioner, Chain
184 LAM 715-011148-002 Arm, Tensioner, Chain, Pin
185 LAM 715-011148-002(A) ARM, TENSIONER, CHAIN
186 LAM 715-011148-002(B) ARM, TENSIONER, CHAIN, PIN
187 LAM 715-011502-001 RING, UPPER COOLING
188 LAM 715-011531-002 ELECTRODE ALUM. ANODIZED
189 LAM 715-011531-008 ELECTRODE ALUM. ANODIZED
190 LAM 715-011531-009 ELECTRODE ALUM. ANODIZED
191 LAM 715-011531-011 ELECTRODE, UPPER
192 LAM 715-011531-012 ELECTRODE, UPPER
193 LAM 715-011531-014 ELECTRODE ALUM. ANODIZED
194 LAM 715-011531-015 ELECTRODE ALUM. ANODIZED
195 LAM 715-011531-102 ELECTRODE ALUM. ANODIZED
196 LAM 715-011532-001 SEAL PLATE
197 LAM 715-011535-001 RING ELECTRODE CLAMP
198 LAM 715-011559-262 CLAMP
199 LAM 715-011563-161 CLAMP, WAFER, DOMED, CERAMIC, 6", 1-FLAT, 4500
200 LAM 715-011565-001 BOLT, CLAMP
201 LAM 715-011565-002 BOLT, CLAMP RETAINING
202 LAM 715-011622-001 LIFTER WAFER 4 - PIN
203 LAM 715-011622-101 LIFTER, WAFER, 4 PIN, FLEXIBLE
204 LAM 715-011629-006 CAP, ELECTRODE, FLAT
205 LAM 715-011629-008 ELECTRODE, LOWER
206 LAM 715-011640-001 RING, FOCUS, LOWER
207 LAM 715-011640-004 RING, FOCUS ANODIZED 4"
208 LAM 715-011640-005 FOCUS RING, ANODIZED
209 LAM 715-011640-006 RING, FOCUS
210 LAM 715-011640-008 FOCUS RING, ANODIZED
211 LAM 715-011664-006 CAP,LOWER ELECTRODE 6"
212 LAM 715-011665-006 LOWER, ELECTRODE, CAP W/VENT GROOVE
213 LAM 715-011673-006 CAP, LOWER ELECTRODE 6"
214 LAM 715-011673-105 CAP, LOWER ELECTRODE
215 LAM 715-011673-106 CAP, LOWER ELECTRODE 6"
216 LAM 715-011746-141 Plate Wafer Clamp 4"
217 LAM 715-011746-151 PLATE 5" .020 DOME REDUCED HEAT
218 LAM 715-011746-156 PLATE, WAFER CLAMP
219 LAM 715-011746-161 PLATE, WAFER CLAMP
220 LAM 715-011749-005 EDGE RING, 5" WAFER CLAMP
221 LAM 715-011749-006 EDGE RING, ANODIZED
222 LAM 715-011753-001 PLATE, BAFFLE, UPPER 6"
223 LAM 715-011754-001 BAFFLE
224 LAM 715-011912-083 BAFFLE, UPPER
225 LAM 715-011913-080 BAFFLE, LOWER
226 LAM 715-011913-083 BAFFLE, LOWER
227 LAM 715-011913-501 BAFFLE, LOWER
228 LAM 715-011925-001 BOLT, CAPPED, CLAMPED RETAINING
229 LAM 715-011927-001 BOLT CAPPED ELECTRODE RETAINING
230 LAM 715-011982-001 CAP, PLUNGER, HOUSING LOWER
231 LAM 715-011985-006 CAP, LOWER ELECTRODE 6" DOMED
232 LAM 715-011985-106 ELECTRODE, LOWER
233 LAM 715-011986-108 CAP, LOWER ELECTRODE
234 LAM 715-012615-001 BLOCK MOUNTING INDEXER REAR
235 LAM 715-018991-006 ELECTRODE,ALUM.ANOD.
236 LAM 715-018991-206 ELECTRODE
237 LAM 715-018991-208 UPPER ELECTRODE
238 LAM 715-021970-008 HOLDER WAFER 8"
239 LAM 715-025106-001 BAFFLE PLATE 8"
240 LAM 715-028087-005 SHROUD 6" HARD ANODIZE
241 LAM 715-028087-101 SHROUD
242 LAM 715-028305-001 CLAMP RETAINER, 1 TURN
243 LAM 715-028408-100 ELECTRODE, UPPER METAL
244 LAM 715-028486-002 PLATE, UPPER SEAL 6" ELECT
245 LAM 715-028559-001 SHOWER HEAD 6"
246 LAM 715-028606-161 Wafer Clamp 6" 
247 LAM 715-028626-002 BAFFLE, UPPER
248 LAM 715-028627-003 BAFFLE, LOWER
249 LAM 715-030136-003  R, EDGE, ESC, 6", FLAT, 4420
250 LAM 715-030320-001 BSR Injection Ring
251 LAM 715-031752-205 CAP, LWR ELECT. 5" DOME .020
252 LAM 715-031752-206 ELECTRODE, LOWER CAP
253 LAM 715-031752-208 CAP LOWER ELECTRODE
254 LAM 715-033098-001 GAS RING
255 LAM 715-07469-002 Electrode, Al.
256 LAM 715-08721-001 Cathode, 6061 A1, Black, Anod
257 LAM 715-09306-005 Ring, Focus, Lower, 4", Lam 490
258 LAM 715-09306-006 Ring, Focus, 6", Ceramic, 490
259 LAM 715-09306-006 Ring, Focus, 6", Al
260 LAM 715-11563-161 Clamp, Wafer, Domed, Ceramic, 6", 1-Flat, 4500
261 LAM 715-11565-1 Bolt, Clamp, Retaining
262 LAM 715-11565-2-C Screw, Vent, #10-32, Pasivated, SS
263 LAM 715-11640-001 Ring, Focus, Lower
264 LAM 715-11640-X Ring, Focus, Lower, Ceramic
265 LAM 715-11746-161 C Clamp, Wafer, Al, 6" (original)
266 LAM 715-11746-161 C Clamp, Wafer, Ceramic, 6"
267 LAM 715-11925-001 Bolt, Retaining, Clamp
268 LAM 715-11927-001 Bolt, Electrode, Clamp, Ring, 4500
269 LAM 715-11986-108 Lower Electrode
270 LAM 715-140124-001-1 BAFFLE, UPPER TPL SET 6"
271 LAM 715-140125-001-1 BAFFLE, LOWER TPL SET 6"
272 LAM 715-140126-001-1 BAFFLE, MIDDLE TPL SET 6"
273 LAM 715-140286-001 RING, FOCUS, 6", MODEL 4420
274 LAM 715-2301851-001 GROUND GRID
275 LAM 715-250516-001 CLAMP, UPPER, ASIQ
276 LAM 715-250586-001 BAFFLE PLT., BOTTOM (601179)
277 LAM 715-250588-001 CLAMP, LOWER, ASIQ
278 LAM 715-250596-001 CLAMPING RING, UPPER
279 LAM 715-250599-001 PLATE, DIFFUSER
280 LAM 715-250717-001 BAFFLE PLATE, TOP (601224)
281 LAM 715-250717-002 BAFFLE, LOWER
282 LAM 715-250899-001 GROUND GRID
283 LAM 715-28608-161 Non-Contact Wafer Clamp
284 LAM 715-31752-206 Electrode Lower 6" 
285 LAM 715-31752-208 Electrode Lower 8" 
286 LAM 715-330000-090 RING, GAS DISPERSION
287 LAM 715-330106-003 CHAMBER, UPPER
288 LAM 715-330135-001 BTM, GAS ESC RIGHT REV B
289 LAM 715-330152-003 HOUSING, SPRING, ADJUSTABLE, 9600
290 LAM 715-330304-002-RW FROG LEG REWORK
291 LAM 715-330312-001 RING, RETAINING, CLIP, 9600
292 LAM 715-330394-002 FROG LEG
293 LAM 715-330825-006 CHAMBER LINER
294 LAM 715-330825-006-RW CHAMBER LINER REWORK
295 LAM 715-330825-007 CHAMBER LINER
296 LAM 715-330889-002 RING,GROUND,CHAMBER
297 LAM 715-330928-002 2 MIL HARD ANODIZE WITH SEALANT
298 LAM 715-330981-001 2 MIL HARD ANODIZE WITH SEALANT
299 LAM 715-330982-001 CHAMBER LINER
300 LAM 715-330984-001 BSR Injection Ring
301 LAM 715-330987-001 BSR Injection Ring
302 LAM 715-331211-001 RECOATING OF ALUMINUM OXIDE ON CHAMBER LINER
303 LAM 715-495014-001-RF REFURBISH, SLIT DOORLINER
304 LAM 715-704598-008 SCREW, 8-32X0.5AL
305 LAM 715-S015808-001 SHOWER HEAD
306 LAM 716-001427-003 CERAMIC DISK
307 LAM 716-001700-001 WINDOW, PLASMA CHAMBER
308 LAM 716-005124-001 Window, Quartz, Rear (490/590)
309 LAM 716-006446-001 DIFFUSER CATHODE, 5.5" 716-06446-001
310 LAM 716-006446-001-S 2465150 CATHODE DIFFUSER SUBSTITUTE
311 LAM 716-006711-001 CATHODE GRAPHITE DFP-2
312 LAM 716-006711-002 CATHODE, GRAPHITE SFG-2
313 LAM 716-006721-001 CERAMIC INSULATOR RING
314 LAM 716-006721-001-D 3-HOLE RING
315 LAM 716-006753-001 INSULATOR RING
316 LAM 716-008608-002 WINDOW WITH STEP
317 LAM 716-008854-001 DIFFUSER DISK
318 LAM 716-008854-001-S 2465140 GAS DIF 2-PC BAFFLE SUBSTITUTE
319 LAM 716-011009-001 QUARTZ WINDOW
320 LAM 716-011036-001 RING, FILLER ORIFICE ALUMINA
321 LAM 716-011036-001-D ORIFICE RING
322 LAM 716-011036-001-E ORIFICE RING
323 LAM 716-011057-002 RING, UPPER FILLER
324 LAM 716-011427-001 DISK, QUARTZ
325 LAM 716-011493-001 QUARTZ SPACER
326 LAM 716-011505-001 DISK DIFFUSER
327 LAM 716-011533-001 WINDOW QUARTZ
328 LAM  716-011536-001 RING, UPPER INSULATOR
329 LAM  716-011540-001 RING FACE UPPER ELECTRODE
330 LAM 716-011543-001 PLATE, WAFER CLAMP ATTACHMENT
331 LAM 716-011563-152 PLATE, WAFER CLAMP
332 LAM 716-011563-161 CLAMP RING
333 LAM 716-011563-162 PLATE, WAFER CLAMP
334 LAM 716-011563-168 PLATE, WAFER CLAMP 6"
335 LAM 716-011563-261 PLATE, WAFER CLAMP
336 LAM 716-011563-262 PLATE, WAFER CLAMP
337 LAM 716-011563-264 PLATE, WAFER CLAMP
338 LAM 716-011563-268 PLATE, WAFER CLAMP
339 LAM 716-011564-001 ELECTRODE, UPPER DFP-2
340 LAM 716-011564-003 ELECTRODE, UPPER SFG-2
341 LAM 716-011570-001 ORIFICE FILLER W/C CERAMIC
342 LAM 716-011571-001 CERAMIC WASHER
343 LAM 716-011572-001 CERAMIC RETAINER CLAMP, 1/4 TURN
344 LAM 716-011573-001 CERAMIC PLUNGER, SHORT
345 LAM 716-011573-004 CERAMIC PLUNGER LONG
346 LAM 716-011573-005 PLUNGER 1/4 TURN
347 LAM 716-011580-063 PLATE W/PINS REV 1
348 LAM  716-011603-001 PLATE, SEAL
349 LAM 716-011624-001 RING, INSULATOR
350 LAM 716-011638-006 RING FOCUS THIN EDGE
351 LAM 716-011638-008 RING, FOCUS, THIN WASHER
352 LAM 716-011651-005 RING EDGE 5"
353 LAM 716-011651-006 EDGE RING, WAFER CLAMP
354 LAM 716-011651-008 RING EDGE WAFER CLAMP 8"
355 LAM 716-011652-006 9.5" CLAMP
356 LAM 716-011759-015 RING EDGE FOCUS W/PINS 5"
357 LAM 716-011759-016 RING, MOUNTING, CERAMIC
358 LAM 716-011764-181 PLATE, W/C 8" .035 DOME
359 LAM 716-011764-281 WAFER CLAMP, PLATE ATTACHMENT
360 LAM 716-011767-181 8" CLAMP RING
361 LAM 716-011775-168 WAFER CLAMP
362 LAM 716-011830-005 FOCUS RING ALUMINA 5"
363 LAM 716-011830-006 WAFER CLAMP, FOCUS RING 6"
364 LAM 716-011830-008 WAFER CLAMP, FOCUS RING 8"
365 LAM 716-011922-001 WAFER CLAMP, RING
366 LAM 716-011923-001 PLATE, WAFER CLAMP ATTACHMENT
367 LAM 716-011963-003 PLATE, WAFER CLAMP ATTACHMENT
368 LAM 716-011981-001 PLUNGER, WAFER, CLAMP, LOWER, MODEL 4528
369 LAM 716-013423-001 LINER SAPPHIRE
370 LAM 716-018527-426 PLATE, WAFER CLAMP
371 LAM 716-018993-001 RING EDGE
372 LAM 716-020904-016 RING, EDGE FOCUS LOWER WAFER CLAMP
373 LAM 716-020904-018 LOWER, FOCUS RING EDGE
374 LAM 716-020905-001 RING, FILLER, LOWER WAFER CLAMP
375 LAM 716-020931-030 PLUNGER, 1 TURN
376 LAM 716-021323-001 FUNNEL QUARTZ MODULE
377 LAM 716-021323-002 FUNNEL QUARTZ MODULE
378 LAM 716-021323-003 FUNNEL QUARTZ MODULE
379 LAM 716-021717-002 BELL JAR SLEEVE
380 LAM 716-021773-002 GASKET ISO CHAMBER
381 LAM 716-021856-001 CHEMRAZ, GASKET
382 LAM 716-021857-001 O-RING
383 LAM 716-021867-001 O-RING
384 LAM 716-021886-002 O-RING, BELL JAR PFE
385 LAM 716-028028-004 ELECTRODE INSULATOR, LOW PRESSURE
386 LAM 716-028123-002 RING, FILTER CERAMIC
387 LAM 716-028249-061 FOCUS RING, ESC-1
388 LAM 716-028249-064 FOCUS RING
389 LAM 716-028251-161 CLAMP, WAFER 60 DEGREE 6"
390 LAM 716-028251-168 CLAMP, WAFER 60 DEGREE 6"
391 LAM 716-028281-001 CONFINEMENT RING
392 LAM 716-028414-015 RING, FOCUS, CERAMIC
393 LAM 716-028414-016 RING, FOCUS
394 LAM 716-028414-018 RING FOCUS 8"
395 LAM 716-028447-002 CERAMIC DISK
396 LAM 716-028454-012 QUARTZ DISK, REV B
397 LAM 716-028547-001 PLATE, WAFER CLAMP
398 LAM 716-028668-261 LOWER WAFER CLAMP
399 LAM 716-028668-262 PLATE, WAFER CLAMP DOMED SHADOW
400 LAM 716-028668-268 SHADOW CLAMP, JEIDA, TOP ASSY
401 LAM 716-028668-281 PLATE, LOWER WAFER CLAMP 8" SHADOW
402 LAM 716-028668-288 PLATE TOP WAFER
403 LAM 716-028678-261 CLAMP RING
404 LAM 716-028678-261 Wafers, Flats (1), Clamp, Shadow, 6" 
405 LAM 716-028688-261 Ring, Equipment
406 LAM 716-028721-261 PLATE WAFER CLAMP DOMED
407 LAM 716-028721-262 BOTTOM WAFER CLAMP
408 LAM 716-028721-268 SHADOW CLAMP, JEIDA, BOTTOM ASSY
409 LAM 716-028721-281 BOTTOM WAFER CLAMP
410 LAM 716-028721-288 BOTTOM WAFER CLAMP 8" MAJOR FLAT
411 LAM 716-028722-161 PLATE, BOTTOM WAFER CLAMP
412 LAM 716-029435-006 RING, ELECTRODE, CERAMIC
413 LAM 716-030135-001 CERAMIC RING
414 LAM 716-030136-001 R, EDGE 6" ESC, MJR FL
415 LAM 716-030167-281 CLAMP, RING, BOTTOM, 8", 9600
416 LAM 716-030362-281 CLAMP RING
417 LAM 716-031052-001 QUARTZ WINDOW HEATED
418 LAM 716-031453-001 RING, FILLER, LOWER CLAMP
419 LAM 716-031453-002 FILLER RING
420 LAM 716-06711-001 Cathode, Quick Change, Graphite, 590
421 LAM 716-06721-001 Ring, Insulator, Ceramic, Large (490, 590)
422 LAM 716-080281-001 QUARTZ RING (REV E1)
423 LAM 716-080297-001 RING, FOCUS, 150MM ESC 384T
424 LAM 716-080399-001 SILICON PIN (REV E1)
425 LAM 716-11533-001 Window, Quartz
426 LAM 716-11563-161 Ring, Electrode, Lower
427 LAM 716-11563-162 Clamp, Domed Ceramic, 6", 2-Flat (4600)
428 LAM 716-11570-001 Filler, Orifice, w/c Ceramic
429 LAM 716-11571-001 Washer, Special, Ceramic
430 LAM 716-11624-001 Ring, Electrode, Lower
431 LAM 716-11638-006 Ring, Focus, Ceramic (4600)
432 LAM 716-11638-008 Ring, Focus, Thin
433 LAM 716-11759-016 Ring, Mounting, Ceramic
434 LAM 716-11922-001 Ring, Electrode, Ceramic
435 LAM 716-11923-001 Ring, Plunger, Ceramic
436 LAM 716-140068-001 CERAMIC FOCUS RING
437 LAM 716-140118-001 RING, FOCUS, ESC
438 LAM 716-140139-001 FILLER RING
439 LAM 716-140139-008 HOT EDGE RING, SILICON
440 LAM 716-140139-008(A) HOT EDGE RING, SILICON CARBIDE
441 LAM 716-140139-213 RING, HOT EDGE, HI WALL ESC 8"
442 LAM 716-140141-261 SILICON RING
443 LAM 716-140163-001 HOT EDGE RING
444 LAM 716-140163-261 RING, HOT EDGE, 15 DEG, ESC, STD, 6"
445 LAM 716-140163-261B RING, HOT EDGE 150 ESC STD 6
446 LAM 716-140236-001 QUARTZ CLAMP
447 LAM 716-140236-061 QUARTZ CLAMP
448 LAM 716-140236-062 QUARTZ CLAMP
449 LAM 716-140286-001 4420 6" FOC  R
450 LAM  716-140427-001 RING, HOT EDGE 150 NCH ESC STD 6
451 LAM  716-140427-001 SAME AS 716-140427-001 IN CERAMIC
452 LAM  716-140427-001 SAME AS 716-140427-001 IN QUARTZ
453 LAM 716-140427-001(A) SAME AS 716-140427-001 IN CERAMIC
454 LAM 716-140427-001(B) SAME AS 716-140427-001 IN QUARTZ
455 LAM 716-140432-001 RING UPPER KEYED
456 LAM 716-140432-061 QUARTZ RETAINING RING
457 LAM 716-140432-062 QUARTZ RETAINING RING
458 LAM 716-160255-002 BELL JAR SLEEVE, ETCH 8.46
459 LAM 716-230121-001 RF SHAPED WINDOW
460 LAM 716-230121-211 RF SHAPED WINDOW
461 LAM 716-249040-001 RING, QUARTZ, LIP, SPLIT
462 LAM 716-249040-002 RING, QUARTZ, UNDERCUT, LIP, SPLIT
463 LAM 716-249391-001 FOCUS RING, USC 200MM
464 LAM 716-250080-001 INSULATOR, UPPER, 150MM
465 LAM 716-250404-001 FOCUS RING QUARTZ
466 LAM 716-250514-001 INSULATOR RING CLAMP CERAMIC
467 LAM 716-250515-002 INSULATOR RING LOWER CERAMIC
468 LAM 716-250972-001 SILICON PIN (REV A)
469 LAM 716-30167-281 Clamp, Ring, Bottom, 8", 9600
470 LAM 716-330004-181 RING, FOCUS, HI, COND. ESC 8"
471 LAM 716-330045-002 EDGE RING 8" - ALLIANCE 9600 PTX
472 LAM 716-330045-004 FOCUS RING 8"
473 LAM 716-330045-261 R, EDGE 6", SEMI, ESC
474 LAM 716-330061-006 PLATE, SHOWERHEAD
475 LAM 716-330061-008 8" PL. SH HD
476 LAM 716-330068-001 GAS RING COVER
477 LAM 716-330121-001 WINDOW, RF, SHAPED CERAMIC
478 LAM 716-330122-002 PLATE TOP CERAMIC
479 LAM 716-330135-001 GAS RING
480 LAM 716-330162-002 RING FILTER
481 LAM 716-330167-152 RING, CLAMP
482 LAM 716-330167-161 CLAMP RING
483 LAM 716-330167-168 RING, CLAMP
484 LAM 716-330167-261 PLATE WAFER CLAMP
485 LAM 716-330167-268 PLATE WAFER CLAMP 6"
486 LAM 716-330167-281 RING CLAMP
487 LAM 716-330190-081 RING, FOCUS, 8" ESC
488 LAM 716-330355-001 QUARTZ WINDOW
489 LAM 716-330355-002 WINDOW, ENDPOINT, DUAL, QUARTZ
490 LAM 716-330504-061 RING FOCUS 6" GDRING JEIDA ESC
491 LAM 716-330504-064 FOCUS RING, 150MM, REV. F
492 LAM 716-330504-064-B FOCUS RING
493 LAM 716-330504-081 FOCUS RING
494 LAM 716-330504-081-F FOCUS RING, FLUTED
495 LAM 716-330504-082 RING,FOCUS 8", CERAMIC
496 LAM 716-330564-061 FOCUS RING
497 LAM 716-330890-001 CONTAINMENT RING BASR
498 LAM 716-330892-001 CERAMIC SHOWER HEAD
499 LAM 716-330892-007 GDP - ALLIANCE 9600 PTX
500 LAM 716-331088-001 EDGE RING QUARTZ
501 LAM 716-443083-004 RING, CONFINEMENT, TOP
502 LAM 716-443084-003 RING, CONFINEMENT, BOTTOM
503 LAM 716-443086-301 RING, H-EDGE, SI SGL X TALL, H-WALL, 8"
504 LAM 716-443090-002 UPPER QUARTZ RING
505 LAM 716-460417-001 INNER CERAMIC LINER
506 LAM 716-460785-002 PLATE, GAS DIST 10 HOLE
507 LAM 716-460875-002 INSULATOR RING (VESPEL)
508 LAM 716-460916-001 RING CHAMBER
509 LAM 716-460916-002 RING, COMPOSITE
510 LAM 716-461085-001 SCRAPER, SIC
511 LAM 716-540198-001 WDO, SILICA, FUSED
512 LAM 718-443144-006 SCREW, PEEK
513 LAM  720-009384-003 SCREW, PAN HEAD
514 LAM  720-009384-004 SCREW, PAN HEAD
515 LAM  720-009384-006 SCREW, PAN HEAD
516 LAM  720-009384-008 SCREW, PAN HEAD
517 LAM  720-009384-010 SCREW, PAN HEAD
518 LAM  720-009384-012 SCREW, PAN HEAD
519 LAM  720-009384-014 SCREW, PAN HEAD
520 LAM  720-009384-016 SCREW, PAN HEAD
521 LAM  720-009384-020 SCREW, PAN HEAD
522 LAM  720-009384-022 SCREW, PAN HEAD
523 LAM  720-009384-024 SCREW, PAN HEAD
524 LAM  720-009384-026 SCREW, PAN HEAD
525 LAM  720-009384-028 SCREW, PAN HEAD
526 LAM  720-009384-030 SCREW, PAN HEAD
527 LAM  720-009384-032 SCREW, PAN HEAD
528 LAM  720-009410-004 SCREW, SOCKET HEAD CAP
529 LAM  720-009410-006 SCREW, SOCKET HEAD CAP
530 LAM  720-009410-008 SCREW, SOCKET HEAD CAP
531 LAM  720-009410-010 SCREW, SOCKET HEAD CAP
532 LAM  720-009410-012 SCREW, SOCKET HEAD CAP
533 LAM  720-009410-014 SCREW, SOCKET HEAD CAP
534 LAM  720-009410-016 SCREW, SOCKET HEAD CAP
535 LAM  720-009410-020 SCREW, SOCKET HEAD CAP
536 LAM  720-009410-022 SCREW, SOCKET HEAD CAP
537 LAM  720-009410-024 SCREW, SOCKET HEAD CAP
538 LAM  720-009410-026 SCREW, SOCKET HEAD CAP
539 LAM  720-009410-028 SCREW, SOCKET HEAD CAP
540 LAM  720-009410-030 SCREW, SOCKET HEAD CAP
541 LAM  720-009410-032 SCREW, SOCKET HEAD CAP
542 LAM  720-009530-004 SCREW, FLAT HEAD
543 LAM  720-009530-006 SCREW, FLAT HEAD
544 LAM 720-009530-008 SCREW, KEL-F, 1/4 - 20 X 0.5", LG., FHSL
545 LAM  720-009530-010 SCREW, FLAT HEAD
546 LAM  720-009530-012 SCREW, FLAT HEAD
547 LAM  720-009530-014 SCREW, FLAT HEAD
548 LAM 720-009530-016 SCREW, FHSL, KEL-F, 1/4-20
549 LAM  720-009530-018 SCREW, FLAT HEAD
550 LAM  720-009530-020 SCREW, FLAT HEAD
551 LAM  720-009530-022 SCREW, FLAT HEAD
552 LAM  720-009530-024 SCREW, FLAT HEAD
553 LAM  720-009530-028 SCREW, FLAT HEAD
554 LAM 720-009531-004 SCREW, #6-32 X 1/4, KEL-F
555 LAM  720-009531-006 SCREW, FLAT HEAD
556 LAM  720-009531-008 SCREW, FLAT HEAD
557 LAM 720-009531-010 FLAT, HD SCREW 6-32 KEL-F
558 LAM  720-009531-012 SCREW, FLAT HEAD
559 LAM  720-009531-014 SCREW, FLAT HEAD
560 LAM 720-009531-016 SCREW, KEL-F, #6-32 X 1" LG. FHSL
561 LAM  720-009531-018 SCREW, FLAT HEAD
562 LAM  720-009531-020 SCREW, FLAT HEAD
563 LAM  720-009531-022 SCREW, FLAT HEAD
564 LAM  720-009531-024 SCREW, FLAT HEAD
565 LAM  720-009531-028 SCREW, FLAT HEAD
566 LAM  720-090943-004 SCREW, FLATHEAD
567 LAM  720-090943-006 SCREW, FLATHEAD
568 LAM  720-090943-008 SCREW, FLATHEAD
569 LAM 720-090943-010 SCREW, FLATHEAD 10-32 KEL-F
570 LAM  720-090943-012 SCREW, FLATHEAD
571 LAM  720-090943-014 SCREW, FLATHEAD
572 LAM  720-090943-016 SCREW, FLATHEAD
573 LAM  720-090943-018 SCREW, FLATHEAD
574 LAM  720-090943-020 SCREW, FLATHEAD
575 LAM  720-090943-022 SCREW, FLATHEAD
576 LAM  720-090943-024 SCREW, FLATHEAD
577 LAM  720-090943-028 SCREW, FLATHEAD
578 LAM 720-092759-016 SCREW, W/O SHOULDER, RING, CONFINEMENT, VESPEL
579 LAM 720-092759-016 Screw, w/ Shoulder, Vespel, 4528
580 LAM 720-092759-016(A) SCREW, W/ SHOULDER, VESPEL, 4528
581 LAM 720-093867-005 SCREW, SET, 9600
582 LAM 720-094109-012 SCREW, KEL-F, #10-32 X 3/4", LG., SHCS
583 LAM 720-09530-008 Screw, Kel-F, 1/4 - 20 x 0.5", Lg., FHSL
584 LAM 720-09531-004 Screw, #6-32 x 1/4, Kel-F
585 LAM 720-09531-016 Screw, Kel-F, #6-32 x 1" Lg. FHSL
586 LAM 720-095483-024 SCREW, NYLON
587 LAM 720-096222-008 SCREW, SOCKET HEAD 6-32 X 1/2
588 LAM 720-096234-006 SCREW, FLAT HEAD
589 LAM 720-443096-014 SCREW, NYLON
590 LAM 720-443208-010 SCREW, BAFFLE, PEEK
591 LAM 722-000966-002 NUT, HEX, JAM, 1/4-20, S/S
592 LAM 722-009637-001 NUT, HEX, KEL-F, #10-32 THRU
593 LAM 722-00966-002 Nut, Hex, Jam, 1/4-20, S/S
594 LAM 723-007749-001 SPACER, SHAFT, PRECISION, 1/4"OD
595 LAM 724-5031727-001 WAFER CLAMP
596 LAM 726-001046-001 RING, RETAINING
597 LAM 727-007574-001 Grommet, 1/4
598 LAM 734-000014-001 O-RING
599 LAM 734-000228-001 O-RING
600 LAM 734-000228-003 O-RING
601 LAM 734-000229-001 O-RING, 11.0ID×1/8C/S, VTN
602 LAM 734-000229-003 O-RING
603 LAM 734-000230-001 8.125 ID X .125 VITON SEAL PLATE
604 LAM 734-000337-001 O-RING
605 LAM 734-000420-001 O-RING
606 LAM 734-000663-001 O-RING, 1.75ID×.125C/S, VTN
607 LAM 734-000690-001 O-RING
608 LAM 734-000799-001 O-RING, 3-11/4IDW1/8C/S
609 LAM 734-000980-001 O-RING
610 LAM 734-000981-001 O-RING
611 LAM 734-000982-001 O-RING
612 LAM 734-001019-001 O-RING
613 LAM 734-001047-001 O-RING
614 LAM 734-001048-001 O-RING
615 LAM 734-001081-001 O-RING
616 LAM 734-001081-003 O-RING
617 LAM 734-001082-001 O-RING
618 LAM 734-001169-001 O-RING
619 LAM 734-001169-003 O-RING
620 LAM 734-001422-001 O-RING
621 LAM 734-001682-001 1.424 ID X .103 POLYURETHANE TRACK MOTOR, ENTRANCE
622 LAM 734-001683-001 O-RING
623 LAM 734-001684-001 O-RING
624 LAM 734-001685-001 O-RING
625 LAM 734-001710-001 O-RING
626 LAM 734-001710-003 O-RING
627 LAM 734-001849-001 O-RING, 8.75 ID X 1/8 C/S, VTN
628 LAM 734-002013-001 O-RING
629 LAM 734-002013-003 O-RING
630 LAM 734-002014-001 O-RING
631 LAM 734-002014-003 O-RING
632 LAM 734-002064-001 O-RING
633 LAM 734-002215-001 O-RING
634 LAM 734-002290-001 O-RING
635 LAM 734-002415-001 O-RING
636 LAM 734-003091-001 O-RING
637 LAM 734-003092-001 O-RING
638 LAM 734-003093-001 O-RING
639 LAM 734-003324-001 O-RING
640 LAM 734-004046-001 0.799 ID X .103 POLYURETHANE ENTRANCE TRACK IDLER
641 LAM 734-004049-001 O-RING
642 LAM 734-004051-001 O-RING
643 LAM 734-004077-001 O-RING
644 LAM 734-004078-001 O-RING
645 LAM 734-004132-001 O-RING
646 LAM 734-004194-001 O-RING, .50ID X 1/16 C/S, VTN
647 LAM 734-005186-001 O-RING
648 LAM 734-005271-001 O-RING, 7/16IDW.103C/S, VTN
649 LAM 734-005632-001 O-RING
650 LAM 734-005633-001 O-RING
651 LAM 734-005634-001 O-RING
652 LAM 734-005635-001 O-RING
653 LAM 734-005636-001 O-RING
654 LAM 734-005637-001 O-RING
655 LAM 734-006000-001 O-RING, 3/4ID×3/32C/S, VTN
656 LAM 734-006000-200 O-RING
657 LAM 734-006041-001 O-RING
658 LAM 734-006042-001 O-RING
659 LAM 734-006043-001 O-RING
660 LAM 734-006304-001 O-RING, .25ID×.063C/S, VTN
661 LAM 734-006304-200 O-RING
662 LAM 734-006337-001 O-RING
663 LAM 734-006338-001 O-RING
664 LAM 734-006760-001 O-RING
665 LAM 734-006761-001 O-RING
666 LAM 734-006762-001 O-RING
667 LAM 734-006763-001 O-RING
668 LAM 734-006767-001 O-RING
669 LAM 734-006776-001 O-RING 5 3/4ID X 3/32 C/S
670 LAM 734-006779-001 O-RING
671 LAM 734-007260-001 O-RING, .312ID×.062C/S, VTN
672 LAM 734-007292-001 O-RING, 9.25ID×.125C/S, VTN
673 LAM 734-007292-002 O-RING
674 LAM 734-007293-001 O-RING
675 LAM 734-007314-001 O-RING, .859ID×.139C/S, VTN
676 LAM 734-007328-001 O-RING, 11.5IDW3/16C/S, VTN
677 LAM 734-007329-001 O-RING, 4.50ID×3/32C/S, VTN
678 LAM 734-007332-001 O-RING
679 LAM 734-007333-001 O-RING, 1.813ID×.103C/S, VTN
680 LAM 734-007334-001 O-RING, 3.00ID×3/32C/S, VTN
681 LAM 734-007335-001 O-RING, 11/16IDW1/16C/S, VTN
682 LAM 734-007355-001 O-RING
683 LAM 734-007356-001 O-RING, 8.50ID×.125C/S, VTN
684 LAM 734-007357-001 O-RING, 10.00 ID X 1/8 C/S, VTN
685 LAM 734-007358-001 O-RING, 13.00 ID X 1/8 C/S, VTN
686 LAM 734-007359-001 O-RING, 14.0ID×.125C/S, VTN
687 LAM 734-007369-001 QUAD RING, 5/8ID×1/16C/S, VTN
688 LAM 734-007412-001 O-RING  18.00 ID X 1/8 C/S (2-
689 LAM 734-007460-001 O-RING, 7.00ID×3/32C/S, VTN
690 LAM 734-007461-001 O-RING Viton
691 LAM 734-007524-051 O-RING
692 LAM 734-007524-121 O-RING
693 LAM 734-007524-122 O-RING
694 LAM 734-007524-208 O-RING
695 LAM 734-007524-209 O-RING
696 LAM 734-007524-275 O-RING
697 LAM 734-007524-284 O-RING
698 LAM 734-007524-286 O-RING
699 LAM 734-007524-287 O-RING
700 LAM 734-007524-288 O-RING
701 LAM 734-007524-289 O-RING
702 LAM 734-007524-293 O-RING
703 LAM 734-007524-294 O-RING
704 LAM 734-007524-295 O-RING
705 LAM 734-007524-296 O-RING
706 LAM 734-007524-297 O-RING
707 LAM 734-007742-001 O-RING, 0.426 ID X .071 C/S, FSI
708 LAM 734-007743-001 O-RING, 2.25ID×.063C/S, VTN
709 LAM 734-007744-001 O-RING  17" ID X 1/8 C/S
710 LAM 734-007762-001 O-RING,QUAD SEAL
711 LAM 734-007783-001 QUAD SEAL, Q4454, 12.5IDW.25
712 LAM 734-008123-001 O-RING, 12.0ID×.125C/S, VTN
713 LAM 734-008179-001 QUAD RING, .938ID×.094C/S, VTN
714 LAM 734-008546-001 O-RING, 7.5IDW3/32C/S, VTN
715 LAM 734-008722-001 O-RING
716 LAM 734-008771-001 O-Ring, .468ID×.078c/s
717 LAM 734-008772-001 O-RING
718 LAM 734-008793-001 O-RING, 2.675 ID X 3/33 C/S, VTN
719 LAM 734-008819-001 O-RING
720 LAM 734-008822-001 O-RING  3.875 ID X .125 C/S VI
721 LAM 734-008822-002 O-RING
722 LAM 734-008834-001 O-RING  13.491 ID X .139 C/S, VTN
723 LAM 734-008835-001 O-RING  10.171 ID X .139 C/S
724 LAM 734-008856-001 O-RING
725 LAM 734-008861-001 O-RING
726 LAM 734-008862-001 O-RING, 2.625 ID×.139 C/S, VTN
727 LAM 734-008863-001 O-RING  6.487 ID X .139 C/S VI
728 LAM 734-008971-001 O-RING,5.75ID?0.125C/S
729 LAM 734-009013-001 O-RING, .75ID×.063C/S, VTN
730 LAM 734-009020-001 O-RING
731 LAM 734-009065-001 O-RING, .351IDW.07C/S, VTN
732 LAM 734-009065-003 O-RING
733 LAM 734-009119-001 O-RING
734 LAM 734-009207-001 O-RING
735 LAM 734-009250-001 O-RING, 5.0ODW3/32C/S, VTN
736 LAM 734-009250-200 O-RING
737 LAM 734-009297-001 O-RING
738 LAM 734-009323-001 O-RING
739 LAM 734-009574-001 O-RING
740 LAM 734-009767-001 O-RING, 1/4IDW1/16C/S, VTN
741 LAM 734-009868-001 O-RING
742 LAM 734-009869-001 O-RING  1 1/2 ID X 1/8 C/S, VTN
743 LAM 734-009908-001 O-RING
744 LAM 734-009909-001 O-RING
745 LAM 734-009910-001 O-RING
746 LAM 734-009914-001 O-RING
747 LAM 734-009992-001 O-RING, .987 ID X .103 C/S, VTN
748 LAM 734-021063-025 O-RING
749 LAM 734-032041-001 O-RING
750 LAM 734-061280-001 O-RING
751 LAM 734-061280-006 O-RING
752 LAM 734-061280-008 O-RING
753 LAM 734-061280-009 O-RING
754 LAM 734-061280-010 O-RING, .239 ID X .070 C/S, VTN
755 LAM 734-061280-011 O-RING
756 LAM 734-061280-012 O-RING
757 LAM 734-061280-014 O-RING
758 LAM 734-061280-015 O-RING
759 LAM 734-061280-019 O-RING
760 LAM 734-061280-022 O-RING
761 LAM 734-061280-109 O-RING  .299 ID X .103 C/S, VTN
762 LAM 734-061280-119 O-RING
763 LAM 734-061280-130 O-RING, 1.625 ID X 3/32 C/S, VTN
764 LAM 734-061280-168 O-RING
765 LAM 734-061280-175 O-RING
766 LAM 734-061280-206 O-RING
767 LAM 734-061280-210 O-RING
768 LAM 734-061280-220 O-RING
769 LAM 734-061280-237 O-RING
770 LAM 734-061280-248 O-RING
771 LAM 734-061280-264 O-RING
772 LAM 734-061280-266 O-RING, VITON, 7.984 ID, .139C/S
773 LAM 734-061280-267 O-RING
774 LAM 734-061280-272 O-RING
775 LAM 734-061280-274 O-RING
776 LAM 734-061280-276 O-RING
777 LAM 734-061280-277 O-RING
778 LAM 734-061280-278 O-RING
779 LAM 734-061280-279 O-RING
780 LAM 734-061280-281 O-RING
781 LAM 734-061280-376 O-RING
782 LAM 734-061280-378 O-RING
783 LAM 734-061280-386 O-RING VITON, 2-386-16.955X.210
784 LAM 734-090037-001 O-RING
785 LAM 734-090045-001 O-RING
786 LAM 734-090048-001 O-RING
787 LAM 734-090049-001 O-RING
788 LAM 734-090478-001 O-RING
789 LAM 734-090516-001 O-RING
790 LAM 734-090633-001 O-Ring, VITON 1 5/16 ID
791 LAM 734-090673-001 O-RING, 2 1/8ID X 1/8 C/S, VTN
792 LAM 734-090690-001 O-RING, 15.955ID X .210 C/S, VTN
793 LAM 734-090704-001 O-RING, 3/8ID X 1/8 C/S, VTN
794 LAM 734-090743-001 O-RING, 3/16 IDW1/16 C/S
795 LAM 734-090745-001 O-RING, 9 IDW1/8 C/S, BLK
796 LAM 734-090783-001 O-RING
797 LAM 734-090788-001 O-RING  1 7/16 ID X 1/8 C/S, VTN
798 LAM 734-090977-001 O-RING
799 LAM 734-091193-001 O-RING  11.50 ID X 1/8 C/S, VTN
800 LAM 734-091228-001 O-RING
801 LAM 734-091429-001 O-RING
802 LAM 734-091944-001 O-RING
803 LAM 734-091952-001 O-RING
804 LAM 734-091993-001 O-RING, 8 1/2 ID X 1/8 C/S, SILICON
805 LAM 734-091994-001 O-RING, 17 ID X 1/8 C/S, FSI
806 LAM 734-091995-001 O-RING
807 LAM 734-092038-001 O-RING, 10 1/2 ID X 1/8 C/S, FSI
808 LAM 734-092040-001 O-RING, 8 1/2 ID X 3/32 C/S, FSILCN
809 LAM 734-092041-001 O-RING, 11 1/2 ID X 3/16 C/S, FSI
810 LAM 734-092069-001 O-RING, 7-3/4 ID X .125 C/S, VTN
811 LAM 734-092107-001 O-RING
812 LAM 734-092325-001 O-RING, 8.50 ID X 1/8 C/S, KALRZ
813 LAM 734-092358-001 O-RING
814 LAM 734-092559-008 O-RING
815 LAM 734-092559-010 O-RING
816 LAM 734-092559-013 O-RING, 3/8 ID X 3/32 C/S, VTN
817 LAM 734-092560-130 O-RING
818 LAM 734-092560-154 O-RING
819 LAM 734-092560-164 O-RING
820 LAM 734-092561-204 O-RING
821 LAM 734-092561-212 O-RING
822 LAM 734-092561-231 O-RING
823 LAM 734-092561-241 O-RING, 3.859 ID×.139 C/S, FSI
824 LAM 734-092561-260 O-RING, 6.484 ID×.139 C/S, FSI
825 LAM 734-092561-267 O-RING
826 LAM 734-092561-270 O-RING, 8.984 ID×.139 C/S, FSI
827 LAM 734-092561-278 O-RING, FSI
828 LAM 734-092561-283 O-RING
829 LAM 734-092825-200 O-RING
830 LAM 734-093324-001 O-RING, 11/64 ID X 1/8 C/S, VTN
831 LAM 734-093789-001 O-Ring  FIG 8, Fluorosilicon
832 LAM 734-093790-001 O-RING
833 LAM 734-094637-001 O-RING, 5.25 IDW.103 C/S, FS
834 LAM 734-095085-017 O-RING
835 LAM 734-095085-120 O-RING
836 LAM 734-095085-204 O-RING
837 LAM 734-095085-211 O-RING
838 LAM 734-097554-001 O-RING
839 LAM 734-250647-012 O-RING
840 LAM 734-250647-266 O-RING
841 LAM 739-000983-001 SEAL, TEFLON, SMALL
842 LAM 739-000984-001 SEAL, TEFLON, LARGE
843 LAM 739-000985-001 SEAL, TEFLON, MEDIUM
844 LAM 739-007783-001 SEAL, QUAD GAP
845 LAM 739-00983-001 Seal, Teflon, Small
846 LAM 739-00984-001 Seal, Teflon, Large
847 LAM 739-00985-001 Seal, Teflon, Medium
848 LAM 739-07783-001 Seal, Quad, Q4454, Viton
849 LAM 746-007608-001 WASHER, THRUST, .25" X .060"
850 LAM 746-007652-001 BEARING, DBL, ROW, ANG. CONT, 15MM
851 LAM 746-090156-001 BEARING, FLANGED, SHIELDED DB2
852 LAM 749-001623-001 FLEXIBLE COUPLER
853 LAM 750-001127-001 LINK, OFFSET, CHAIN, #25
854 LAM 750-002176-001 LINK, MASTER, CHAIN, #25
855 LAM 750-007781-001 CHAIN, ROLLER #25
856 LAM 750-007782-001 CHAIN, ROLLER #35, 15.75" LG.
857 LAM 750-01127-001 Link, Offset, Chain, #25
858 LAM 750-02176-001 Link, Master, Chain, #25
859 LAM 750-07781-001 Chain, Roller #25
860 LAM 750-07782-001 Chain, Roller #35, 15.75" Lg.
861 LAM 750-090192-001 LINK, MASTER, SST, #35
862 LAM 751-009531-010 O-RING
863 LAM 752-000224-008 PIN, ROLL, 3/32 X 1/2 LG.
864 LAM 754-007751-001 SPRING, TENSIONER, SS
865 LAM 754-009002-015 Spring, Compression, SST
866 LAM 754-07751-001 Spring, Tensioner, SS
867 LAM 754-09002-015 Spring, Plunger, Assy, 30 lbs.
868 LAM 754-090359-015 SPRING, SST
869 LAM 754-090359-015 Spring, Compression, SS
870 LAM 754-090457-014 SPRING, COMPRESSION
871 LAM 754-091624-001 SPRING, COMPRESSION
872 LAM 754-092082-002 BEARING, GUIDE, W/SPRING, LEAF
873 LAM 754-093243-006 SPRING, CPRSV, WIRE, 9600
874 LAM 756-007809-010 SCR, SCHD, SHLDR, 10-32
875 LAM 765-000786-001 SPROCKET, DRIVEN, 1.214 PD
876 LAM 765-007787-001 SPROCKET, DRIVEN, 2.873 PD
877 LAM 766-008456-001 VALVE, AIR
878 LAM 766-009866-040 O-RING
879 LAM 775-009142-001 O-RING
880 LAM 790-006301-001 LIFTER, CHAMBER, BACK-UP
881 LAM 790-008784-001 O-RING
882 LAM 790-092080-002 BEARING, LOCK, OVER
883 LAM 790-092081-001 BOLT, CRANK
884 LAM 795-020446-005 WINDOW SAPPHIRE
885 LAM 795-250729-001 LENS, CONVEX
886 LAM 796-000233-003 O-RING
887 LAM 796-000233-004 O-RING
888 LAM 796-000233-005 SEAL, CENTERING RING, NW16
889 LAM 796-001233-001 O-RING
890 LAM 796-002232-001 O-RING
891 LAM 796-008976-002 O-RING
892 LAM 796-009021-001 O-RING
893 LAM 796-028633-010 SCREW, AL, PLATE, BAFFLE, MODEL 4528
894 LAM 796-097155-001 O-RING
895 LAM 796-098648-001 O-RING, SEAL, GATE
896 LAM 80SQ045b (diode) 80SQ045B (DIODE)
897 LAM 833-011076-001 833-11076-001
898 LAM 839-003958-001 DIFFUSER, LL
899 LAM 839-006731-001 ELECTRODE BOLT
900 LAM 839-007158-001 GAS FEED FLEX LINE
901 LAM 839-007173-001 GAS LINE WELDMENT
902 LAM 839-007191-001 WELDMENT CONNECTOR BULKHEAD
903 LAM 839-009866-040 BELLOWS
904 LAM 839-012255-001 BELLOWS
905 LAM 839-013901-001 THROTTLE VALVE ISO100 4"
906 LAM 839-022443-001 WINDOW ENCLOSURE CONCENTRIC HLM
907 LAM 839-022475-001 EXTENSION, ENCLOSURE CONCENTRIC HLM
908 LAM 839-022476-001 DRIP PAN UPPER
909 LAM 839-022507-001 ENCLOSURE HEADLOAD CMP
910 LAM 839-031766-001C BELLOWS LIFT
911 LAM 839-249094-001 HOUSING, PIN, SENSE
912 LAM 839-249271-001 PIN, CARBIDE, 200MM
913 LAM 839-249332-001 PIN, CARBIDE, 200MM
914 LAM 839-249332-001RE2 Housing, Pin, Sense, SS
915 LAM 839-250484-001 24" GAS FEED FLEX LINE
916 LAM 839-250568-001 BELLOWS,LOWER ELECTRODE
917 LAM 839-330743-003 BELLOWS BOTTOM ROD, LIFTER
918 LAM 839-460038-001 WELDMENT, BELLOWS FEEDTHRU
919 LAM 839-460039-001 WELDMENT, BELLOWS LIFT
920 LAM 839-470315-001 CAP, GAS
921 LAM 839-495013-001 LINER, CHAMBER
922 LAM 840-009865-040 KIT, HPS VALVE REPAIR NW-40
923 LAM 840-009865-080 O-RING
924 LAM 840-090086-001 O-RING (SET)
925 LAM 852-011060-001 KIT, GAP
926 LAM 853-006710-XXX UPPER ELECTRODE ASSY
927 LAM  853-008389-001 ASSY, ELECTRODE LWR 4 PIN
928 LAM  853-008389-002 ASSY, ELECTRODE LWR 4 PIN
929 LAM  853-008389-003 ASSY, ELECTRODE LWR 4 PIN
930 LAM 853-008855-002 6" UPPER ELECTRODE ASSY
931 LAM 853-008855-004 6" UPPER ELECTRODE ASSY
932 LAM 853-008855-005 6" UPPER ELECTRODE ASSY
933 LAM 853-009154-007 WAFER ARM ASSEMBLY
934 LAM 853-009536-001 ASSY., SEAL PLATE, CHAMBER, REAR
935 LAM 853-090133-004 ASSY, ELECTRODE LWR FOCUS
936 LAM 853-090133-005 ASSY, ELECTRODE LWR FOCUS
937 LAM 853-090133-006 ASSY, ELECTRODE LWR FOCUS
938 LAM 853-090133-014 ASSY, ELECTRODE LWR FOCUS
939 LAM 853-090133-015 ASSY, ELECTRODE LWR FOCUS
940 LAM 853-090133-016 ASSY, ELECTRODE LWR FOCUS
941 LAM 853-210621-306 REV A AL RING
942 LAM 853-441511-001 PLATE, CAP, GAS
943 LAM 857-010229-001 PUCK, ALIGNMENT
944 LAM 885-425420-001 QUARTZ CLAMP
945 LAM ALC-1001-001 CHAMBER LINER
946 LAM AS568A-167#2037 O-RING, DUPONT KALREZ
947 LAM GI751 (diode) GI751 (DIODE)
948 LAM MFC:UNIT1200A-RF REFURBISHED, MFC, UNIT 1200A  W/O CORE EXCH
949 LAM  PART NUMBER DESCRIPTION
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