| Open-box Parts or Used Parts | ||||
| OEM P/N | DESCRIPTION | QTY. | OEM | LOCATION |
| 16206-01 | LIFT CHAMBER | 1 | GASONICS | A2G300001 |
| 16209-01 | INSULATOR STUD | 1 | GASONICS | A2G300002 |
| 16498-01 | BRANSON/IPC, DISPLAY DRIVER | 1 | GASONICS | A2G300003 |
| 16498-01 | BRANSON/IPC, DISPLAY DRIVER | 1 | GASONICS | A2G300004 |
| 73797-05 | PWB ASSY SCR CONTROL | 1 | GASONICS | A2G300005 |
| 90-1025-04 | PCB ASSY | 6 | GASONICS | A2G300006 |
| 90-2607 | PCB CONTROLLER BOARD | 1 | GASONICS | A2G300007 |
| 90-2609 | PCB DISPLAY DECODER | 1 | GASONICS | A2G300008 |
| 90-27004 | HEAT SOLUTION | 1 | GASONICS | A2G300009 |
| 90-27010 | HEAT SOLUTION | 1 | GASONICS | A2G300010 |
| 90-27010 | HEAT SOLUTION | 1 | GASONICS | A2G300011 |
| 94-1086 | ARM THETA ASSY W/PCB | 1 | GASONICS | A2G300012 |
| 94-1119 | LOAD LOCK LIFT | 4 | GASONICS | A2G300013 |
| 94-1179 | KIT SENSOR | 1 | GASONICS | A2G300014 |
| 94-3162 | DISPLAY 3500 | 1 | GASONICS | A2G300015 |
| 95-0289 | PCB CONTROLLER | 1 | GASONICS | A2G300016 |
| 95-0517 | PCB, MOTHER 486 DX MTB | 1 | GASONICS | A2G300017 |
| 95-16511 | MINIMATIC, SENSOR | 2 | GASONICS | A2G300018 |
| 95-2778 | CONTACTOR PLATE | 1 | GASONICS | A2G300019 |
| 95-4186 | POWER SUPPLY | 1 | GASONICS | A2G300020 |
| A01-012-01 | CHAMBER BOTTOM AURA 1000 | 1 | GASONICS | A2G300021 |
| A01-330-01 | WINDOW RING | 1 | GASONICS | A2G300022 |
| A02-083-01 | BRACKET WAFER SUPPORT | 1 | GASONICS | A2G300023 |
| A06-300-01 | QUARTZ WINDOW W/ HOLE | 1 | GASONICS | A2G300024 |
| A09-004-01 | REFLECTOR, LAMP TRAY | 1 | GASONICS | A2G300025 |
| A38-026-01 | BREAKER CIRCUIT AMPS 30 277VAC. MAX. 50/60HZ CURVE 10 | 1 | GASONICS | A2G300026 |
| A89-014-01 | DECODER PCB | 1 | GASONICS | A2G300027 |
| A90-002-01 | PCB, VACUUM GAUGE AMP | 1 | GASONICS | A2G300028 |
| A90-005-02 | PCB CONTROLLER BOARD | 1 | GASONICS | A2G300029 |
| A90-013-01 | PCA LED INTERFACE | 1 | GASONICS | A2G300030 |
| A90-024-02 | PCB, SCR, CONTROL | 1 | GASONICS | A2G300031 |
| A90-029-03 | PCB LL LIFT LOGIC 8'' | 1 | GASONICS | A2G300032 |
| A90-029-03 | PCB LL LIFT LOGIC 8'' | 1 | GASONICS | A2G300033 |
| A90-031-01 | PCB FAIL DETECT | 1 | GASONICS | A2G300034 |
| A90-039-01 | PCB, SENSOR, CURRENT, LAMP | 1 | GASONICS | A2G300035 |
| A93-021-01 | WAVE GUIDE | 1 | GASONICS | A2G300036 |
| A94-032-02 | PCB ASSY | 1 | GASONICS | A2G300037 |
| A94-064-01 | ARM | 2 | GASONICS | A2G300038 |
| A95-006-01 | ENDPOINT ASSEMBLY | 2 | GASONICS | A2G300039 |
| A95-006-01 | ENDPOINT ASSEMBLY | 1 | GASONICS | A2G300040 |
| A95-006-01 | ENDPOINT ASSEMBLY | 1 | GASONICS | A2G300041 |
| A95-006-01 | ENDPOINT ASSEMBLY | 2 | GASONICS | A2G300042 |
| A95-006-01 | ENDPOINT ASSEMBLY | 6 | GASONICS | A2G300043 |
| A95-006-01 | ENDPOINT,ASSEMBLY | 1 | GASONICS | A2G300044 |
| A95-027-01 | PRE FIRE AURA | 1 | GASONICS | A2G300045 |
| A95-027-04 | ASSY PREFIRE WELECTRODE | 1 | GASONICS | A2G300046 |
| A95-030-01 | PCB, AURA DISPLAY | 3 | GASONICS | A2G300047 |
| A95-070-01 | TRANSFORMER FILAMENT AURA | 1 | GASONICS | A2G300048 |
| A95-075-01 | ELEVATOR PROCESS CHAMBER | 1 | GASONICS | A2G300049 |
| A95-104-01 | ELEVATOR 8" | 1 | GASONICS | A2G300050 |
| A95-104-01 | ELEVATOR 8" | 1 | GASONICS | A2G300051 |
| A95-104-01 | ELEVATOR 8" | 1 | GASONICS | A2G300052 |
| A95-104-03 | ELEVATOR, TYPE 16-08-13B | 1 | GASONICS | A2G300053 |
| A95-121-01 | ASSY LOADLOCK DOORINTERNAL | 1 | GASONICS | A2G300054 |
| A95-130-01 | GAUGE ASSY, LL, 8" | 1 | GASONICS | A2G300055 |
| A95-130-01 | GAUGE ASSY, LL, 8" | 1 | GASONICS | A2G300056 |
| A97-034-01 | KIT MICROWAVE TUNING ROD | 1 | GASONICS | A2G300057 |
| A97-127-01 | KIT, LAMP,FAIL | 1 | GASONICS | A2G300058 |
| RA93-021-04 | ASSY, WAVE GUIDE | 1 | GASONICS | A2G300059 |
| RA93-021-04/C | WAVE GUIDE ASSY | 2 | GASONICS | A2G300060 |